发明名称 VAPOR CELL AND METHOD FOR MAKING SAME
摘要 Vapor cells and methods for making the same are presented, in which a cell cavity is completely filled with aqueous alkali metal azide solution and the solution is dried at a controlled evaporation rate to substantially maintain edge contact pinning at an interface with the cavity sidewall to promote preferential evaporation in the center and outward capillary flow from an unpinned air-fluid interface toward the sidewall to form crystallized alkali metal material at the sidewall while inhibiting drying of dispersed aqueous solution on a transparent cavity bottom to provide substantially unrestricted passage of light through the cavity for atomic clock and other applications.
申请公布号 US2016294402(A1) 申请公布日期 2016.10.06
申请号 US201514672493 申请日期 2015.03.30
申请人 Texas Instruments Incorporated 发明人 Dyer Terrence Edward;Brockie Nathan Luke
分类号 H03L7/26 主分类号 H03L7/26
代理机构 代理人
主权项 1. A method for fabricating a vapor cell, comprising: forming a cavity including at least one sidewall extending between first and second sides of a substrate; bonding a lower window to the second side of the substrate to form a cavity bottom; filling the cavity with an aqueous solution comprising an alkali metal material, the aqueous solution extending to a contact line substantially at a top of the at least one sidewall of the cavity proximate the first side of the substrate; drying the aqueous solution at a controlled temperature and humidity to substantially maintain edge contact pinning of the aqueous solution at a pinned fluid interface between the aqueous solution and the at least one sidewall to promote preferential evaporation of the aqueous solution proximate a center of an unpinned air-fluid interface and outward capillary fluid flow of the aqueous solution from the unpinned air-fluid interface toward the pinned fluid interface and to promote drying of dispersed aqueous solution to form crystallized alkali metal material proximate the at least one sidewall and to inhibit drying of dispersed aqueous solution on the cavity bottom; bonding an upper window to the first side of the substrate to seal the cavity; and exposing the crystallized alkali metal material to UV photolysis to form an alkali metal gas in the sealed cavity.
地址 Dallas TX US