Lighting system for illuminating conductor plates or wafers

摘要

A lighting system comprises a light source surrounded by a housing, and optical channels for the transfer of light from the inside of the housing to at least one outside location. The number of optical channels (5) corresp. to the number of external locations to which light is transferred. The optical channels (5) have optical coupling units (6) on the light inlet side, which direct the max. light density of the light source (1) to the appropriate channel.The optical channels are pref. located in penetrations (9) in the housing (2). Use - The lighting system is used eg. for illuminating conductor plates or wafers. Advantage - The lighting system is simple and effective.