发明名称 DEVICE AND METHOD FOR COLLECTING DUST AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a dust-collecting device that has sufficient dust collection capability, and at the same time can easily suck and convey a semiconductor device. SOLUTION: When machining such as cutting and forming is made to a semiconductor device 4 in a first die 2 or the like, an air take-in switching device 10 breaks the communication between the inside of piping 6 and the fresh air, and supplies dust collection pressure that is generated in a dust collection motor 5 to each die as it is for reliably collecting burr rubbish 9. On the other hand, when a conveyance unit 7 sucks and conveys the semiconductor device 4 at the part between the first die 2 and a second die 3, or the like, the air take-in switching device 10 allows the inside of piping 6 to communicate with the fresh air, and approaches the dust collection pressure that is generated in the dust collection motor 5 to atmospheric pressure for supplying to each die, thus easily sucking and conveying the semiconductor device 4 by the conveyance unit 7.
申请公布号 JP2001326234(A) 申请公布日期 2001.11.22
申请号 JP20000143283 申请日期 2000.05.16
申请人 MITSUBISHI ELECTRIC CORP;MITSUBISHI ELECTRIC ENGINEERING CO LTD 发明人 YAMAZAKI HIDETAKA;IKEGAMI TAKEHIKO
分类号 H01L21/56;H01L21/02;(IPC1-7):H01L21/56 主分类号 H01L21/56
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