| 摘要 |
PROBLEM TO BE SOLVED: To provide a positioning device which suppresses relative displacement between a movable point and a plurality of positioning objects, and can perform high-accuracy positioning, and a positioning control device.SOLUTION: A positioning device comprises: a moving stage 102; stage position detection means 105 which detects a position of the moving stage; a control device 2 which performs the positioning of the moving stage; positioning objects for positioning the moving stage; and at least one or more sensors at the positioning objects or a structure of the moving stage. In a positioning control device, the control device comprises: relative displacement estimation means 201 which estimates a relative displacement amount of the moving stage and the positioning objects by using the information of the sensors and the information of the stage position detection means; and means 203 which controls the position of the stage by using the information which is calculated by the relative displacement amount estimation means. |
