WAFER GROUP, AND DEVICE AND METHOD FOR MANUFACTURING WAFER

摘要

PROBLEM TO BE SOLVED: To provide a wafer group that can easily form products with uniformity when there is variations in compositions of the wafers, and a technique of highly precisely and certainly forming an OF (orientation flat) by removing uncertainties in forming the OF.SOLUTION: There are provided a wafer group formed of 70 or more wafers, which each have an OF with an OF orientation precision within a range of ±0.010° and are obtained from the same ingot, and a technique relating to the wafer group.SELECTED DRAWING: Figure 3