OPTICAL MEMBER FOR DEEP ULTRAVIOLET AND PROCESS FOR PRODUCING SAME

摘要

The present invention relates to an optical member for deep ultraviolet having a wavelength of 250 nm or shorter, containing a synthetic silica glass which does not substantially contain a halogen element, has a maximum OH group content of less than 10 ppm by weight, has contents of ODC (oxygen deficient centers) and E-prime center of each less than 1×10 14 cm -3 , does not substantially contain SiH and peroxy linkage, and has a fictive temperature of 1,050°C or lower.