METHOD FOR MANUFACTURING THIN FILM BATTERY, AND FACILITY THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide: a method for manufacturing a thin film battery; and a facility therefor.SOLUTION: Provided are a method for manufacturing a thin film battery and a facility therefor. The manufacturing method comprises: a first process tool for depositing a metal layer or semiconductor layer; a second process tool for depositing an active layer; a third process tool for performing rapid thermal processing; a fourth process tool for depositing a dielectric layer; a fifth process tool for performing reactive ion etching; and a sixth process tool for depositing a special layer for a thin film battery 200. The second process tool comprises: a first cluster tool for depositing a cathode layer 210; a second cluster tool for depositing an electrolytic layer 214; and a lithium evaporation tool including one or more glove boxes coupling the lithium evaporation tool to the first cluster tool and to the second cluster tool.