主权项 |
1. A neutron detector with monolithically integrated readout circuitry, comprising:
a bonded semiconductor die including an etched substrate bonded to an active semiconductor substrate; an ion chamber formed in the etched substrate, the ion chamber having a pair of parallel, substantially planar surfaces; a first electrode formed on one said surface; a second electrode formed on the other said surface at an interelectrode separation distance from the first electrode; a material, filling the ion chamber, that reacts with neutrons to create ion trails; and readout circuitry formed in a portion of the active semiconductor substrate and electrically coupled to the first and second electrodes; wherein the interelectrode separation distance is no more than half an attenuation length for thermal neutrons in the ion-trail-creating material filling the ion chamber at a pressure of 100 atm at room temperature. |