| 摘要 |
PROBLEM TO BE SOLVED: To provide a Mn- and Nb-doped PZT based piezoelectric material film high in piezoelectric constant, low in dielectric constant, and superior in stability after a polarization process.SOLUTION: A Mn- and Nb-doped PZT based piezoelectric material film comprises a Mn- and Nb-doped complex metal oxide. In the film, metal atoms' ratio (Pb:Mn:Nb:Zr:Ti) satisfies (0.98-1.12):(0.002-0.056):(0.002-0.056):(0.40-0.60):(0.40-0.60). If the total of Mn and Nb metal atoms' ratios is one (1), the proportion of Mn is 0.20-0.80. If the total of Zr and Ti metal atoms' ratios is one (1), the proportion of Zr is 0.40-0.60. If the total of Mn, Nb, Zr and Ti metal atoms' ratios is one (1), the total proportion of Zr and Ti is 0.9300-0.9902. |
