METHOD OF SETTING RECIPES OF A DEFECT TEST

摘要

A method for setting recipes of a defect test is provided to improve reliability of test equipment by adjusting laser power according to obtained gray level and cumulative pixel distribution. A method for setting recipes of a defect test comprises the steps of: obtaining a laser intensity map of a sample(S110); setting a first area and a second area on the laser intensity map on the laser intensity map(S120); performing an area scanning on each area for obtaining gray levels for each area(S130); obtaining cumulative pixel distribution of the gray levels(S140); and adjusting laser power according to the gray level and cumulative pixel distribution(S150).