| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for contactlessly inspecting a photoexcited carrier generation area of a photo device formed on a substrate.SOLUTION: An inspection device 100 inspects a solar cell panel 90 in which photo devices are formed. The inspection device 100 includes a radiation unit 12 for radiating pulse light LP11 to the solar cell panel 90 through a light receiving face 91s thereof, and a detection unit 13 (detector 132) for detecting an electric field intensity of a terahertz wave pulse TL1 generated in response to the radiation of the pulse light LP11. |
