| 摘要 |
PROBLEM TO BE SOLVED: To detect an accurate substrate potential on a semiconductor circuit.SOLUTION: A substrate potential detection circuit 10 includes a reference voltage output circuit 16 which can change a reference voltage Vref for a reference voltage, and compares a voltage Vp output from a detection voltage output circuit 12 with the reference voltage Vref output from the reference voltage output circuit by means of a comparator 14. A control unit 40 compares the reference voltage output from the reference voltage output circuit with the voltage Vp at a measuring point from which the change of potential is removed, and calibrates the substrate potential detection circuit by holding the deviation of a reference voltage, from a reference voltage output from the reference voltage output circuit, at a deviation when the reference voltage Vref reaches the voltage Vp. |
