| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring device that reduces fluctuation in a measured value due to the effect of heat or the swaying of an air space, and can measure the surface shape of a measurement object accurately.SOLUTION: A shape measuring device scans a measurement object with a detector having displacement gages 31a-31c, and measures the surface shape of the measurement object. The shape measuring device has covering means 50 that covers the displacement gages and has an opening 51 between the displacement gages and the measurement object, and air blowing means 60 that blows air into the covering means.SELECTED DRAWING: Figure 4 |
