OPTICAL SCANNER AND INSPECTION DEVICE

摘要

PROBLEM TO BE SOLVED: To realize efficient optical scanning even if there are only a small number of light sources in the scanner.SOLUTION: An optical scanner 10 includes: a substrate 110; a rotational axis 120; a plurality of reflection regions 140; and a light source 300. The rotational axis 120 is for the substrate 110. The reflection regions 140 are arranged to be separate from one another on a first surface 130 of the substrate 110. The reflection regions 140 reflect a light 302 from the light source 300 to a target 20. The target 20 thus has a plurality of scanning points 200 corresponding to the reflection regions 140.SELECTED DRAWING: Figure 1