发明名称 |
PATTERNING DEVICES USING FLUORINATED COMPOUNDS |
摘要 |
A method for producing a spatially patterned structure includes forming a layer of a material on at least a portion of a substructure of the spatially patterned structure, forming a barrier layer of a fluorinated material on the layer of material to provide an intermediate structure and exposing the intermediate structure to at least one of a second material or radiation to cause at least one of a chemical change or a structural change to at least a portion of the intermediate structure. The barrier layer substantially protects the layer of the material from chemical and structural changes during the exposing. Substructures are produced according to this method. |
申请公布号 |
US2016343946(A1) |
申请公布日期 |
2016.11.24 |
申请号 |
US201615226411 |
申请日期 |
2016.08.02 |
申请人 |
The Johns Hopkins University |
发明人 |
KATZ Howard E.;DHAR Bal Mukund |
分类号 |
H01L51/00;G03F7/20;H01L51/05 |
主分类号 |
H01L51/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
Baltimore MD US |