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发明名称
VACUUM PUMP WITH MAGNETIC BEARING SYSTEM AND BACK-UP BEARINGS
摘要
申请公布号
EP0981690(B1)
申请公布日期
2004.09.22
申请号
EP19990909922
申请日期
1999.03.09
申请人
VARIAN, INC.
发明人
CASARO, FAUSTO;LAAGER, ALAIN;SIEGWART, ROLAND
分类号
F04D19/04;F04D29/04;F04D29/058;F16C39/02;F16C39/06;(IPC1-7):F04D19/04
主分类号
F04D19/04
代理机构
代理人
主权项
地址
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