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发明名称
SPUTTER WITH COLLIMATOR FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100474983(B1)
申请公布日期
2005.02.24
申请号
KR19970020730
申请日期
1997.05.26
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
AHN, YONG SIK;KIM, BYEONG JUN
分类号
H01L21/203;(IPC1-7):H01L21/203
主分类号
H01L21/203
代理机构
代理人
主权项
地址
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