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发明名称
GAS SUPPLY INTEGRATION UNIT
摘要
申请公布号
KR100825050(B1)
申请公布日期
2008.04.24
申请号
KR20067020398
申请日期
2006.09.29
申请人
发明人
分类号
F17C13/04;H01L21/02;F17D1/04;H01L21/205
主分类号
F17C13/04
代理机构
代理人
主权项
地址
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