| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card assembly substrate capable of shortening a delivery period and reducing a cost by sharing an insulating base. SOLUTION: The probe card assembly substrate includes an insulation layer having a first surface and a second surface, a plurality of contact terminals formed on the first surface, a plurality of electrode groups 6 for power supply electrically connected with the plurality of contact terminals and formed in a central region C located at the center of the second surface, and a plurality of signal electrode groups 10 electrically connected with the contact terminals and formed in a peripheral region P located around the central region C. An area of each of the signal electrode groups 10 is larger than that of each of the electrode groups 9. COPYRIGHT: (C)2008,JPO&INPIT
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