| 摘要 |
PROBLEM TO BE SOLVED: To provide an acceleration sensor preventing the measurement accuracy from lowering, wherever practicable, due to crosstalks, in directions other than an acceleration measurement direction. SOLUTION: This acceleration sensor is equipped with a substantially cylindrical nonmagnetic case 2 with its both ends 2a and 2b opened; a magnetic fluid 5; a permanent magnet 5' moving in the nonmagnetic case 2, while attracting the magnetic fluid 5; a detection part comprising a detection element 11 for detecting the position of the permanent magnet 5, drive coils 10a and 10b generating electromagnetic force so as to hold the permanent magnet 5' in its original position based on an output of the detection element 11, and a servo circuit for controlling the current applied to the drive coils 10a and 10b; and an air duct 4 running outside the nonmagnetic case 2 to connect both ends 2a and 2b of the nonmagnetic case 2. COPYRIGHT: (C)2008,JPO&INPIT
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