发明名称 Surface-roughness/contour measuring apparatus
摘要 A surface-roughness/contour measuring apparatus (1) comprises: a stylus orientation changing part (9) by which a rotatable support part (62, 64, 71a, 71b) for supporting a cantilever (7) in such a manner as to be rotatable on a rotational axis extending in a direction perpendicular to the longitudinal direction of the cantilever (7) is rotated about the longitudinal direction of the cantilever (7), thereby changing the orientation of a stylus (11) provided at a forward end of the cantilever (7); and a balancing member (63) which balances the weight of the cantilever (7) about the rotational axis in order to eliminate the effect of the gravitational force acting on the cantilever (7) rotating with the rotation of the rotatable support part (62, 64, 71a, 71b).
申请公布号 US2009025464(A1) 申请公布日期 2009.01.29
申请号 US20060660132 申请日期 2006.05.29
申请人 ISHII MASAFUMI 发明人 ISHII MASAFUMI
分类号 G01B5/28 主分类号 G01B5/28
代理机构 代理人
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