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发明名称
VERFAHREN ZUR CHEMISCHEN PLASMADAMPFABLAGERUNG
摘要
申请公布号
DE60330593(D1)
申请公布日期
2010.01.28
申请号
DE20036030593
申请日期
2003.10.29
申请人
MITSUBISHI HEAVY INDUSTRIES LTD.
发明人
MASHIMA, HIROSHI;YAMADA, AKIRA;KAWAMURA, KEISUKE;TAGASHIRA, KENJI;TAKEUCHI, YOSHIAKI
分类号
H01L21/205;C23C16/509;H01J37/32
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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