LOW-VOLATILITY COMPOUNDS FOR USE IN FORMING DEPOSITED LAYERS
摘要
The present invention relates to the use of low-vofatility compounds in forming deposited layers and to methods for accomplishing such deposition. Particular applicability is in the field of depositing layers for semiconductor devices. A solution made up of fow vapor pressure solutes (source materials) and solvents, wherein the solvents have a vapor pressure several orders of magnitude lower than that of the solute is described. The solutions are introduced to a vaporization apparatus configured to enable rapid and efficient vaporization of the solute with minimum evaporation of solvent and minimum decomposition of solute.
申请公布号
WO2009017962(A3)
申请公布日期
2010.01.28
申请号
WO2008US70051
申请日期
2008.07.15
申请人
LINDE, INC.;AITCHISON, KENNETH, A.;ATHALYE, ATUL;MA, CE