METHOD FOR MANUFACTURING OPTICAL SCANNER, OPTICAL SCANNER, IMAGE DISPLAY DEVICE, AND HEAD-MOUNTED DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing an optical scanner capable of obtaining excellent optical scanner reliability while increasing the number of pieces obtained from a substrate (wafer), an optical scanner, an image display device, and a head-mounted display.SOLUTION: A method for manufacturing an optical scanner 1 comprises: a first step of forming a structure 51 including a junction film 16 on a first substrate 50 at a first pitch; a second step of forming a structure 61 including a junction film 17 on a second substrate 60 at a second pitch different from the first pitch; a third step of joining the junction film 16 of the structure 51 to the junction film 17 of the structure 61; and a fourth step of removing the joined structure 51 from the first substrate 50. The height of the surface to which the junction film 17 of the structure 61 is joined is higher than a surface of a portion facing the junction film 16 of the structure 51 of the second substrate 60 not joined in the third step.SELECTED DRAWING: Figure 8