发明名称 |
PROBE CARD |
摘要 |
PURPOSE: To provide a probe card that does not necessarily require a sub for expanding the pitch interval of a conductive path.CONSTITUTION: The probe card C1 includes a plurality of probes P1 and fixers C11 and C12. The probe P1 includes a main body 11 and connectors 15. The main body 11 is fixed on the fixers C11 and C12 at intervals. The connectors 15 extend radially from the main body 11. The fixers C12 have a plurality of conductors C12a disposed at larger intervals than the main body 11. The conductor C12a is electrically and mechanically connected to the connector 15.SELECTED DRAWING: Figure 1A |
申请公布号 |
JP2016148566(A) |
申请公布日期 |
2016.08.18 |
申请号 |
JP20150024885 |
申请日期 |
2015.02.12 |
申请人 |
JAPAN ELECTRONIC MATERIALS CORP |
发明人 |
MATSUOKA KEIJI;KIKUKAWA DAISUKE;INOUE AYUMI;MATSUBARA HARUKA;INOUE MASAYA;MIYAKAWA YUSUKE |
分类号 |
G01R1/073;G01R1/067;H01L21/66 |
主分类号 |
G01R1/073 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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