发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a method by which reliable underfill compositions can be formed without any void while solder bump positioning is easy. <P>SOLUTION: A first underfill composition is applied on a surface of a silicon wafer in two layers, a high-concentration filler is mixed with a first underfill composition enclosing a solder bump side surface portion, and then the applied first underfill composition is brought into a B-stage to form a layer of the first underfill composition having a thickness ranging from 0.5 to 1.0 times the height of the solder bump. A second underfill composition containing a flux component is applied thereupon and the applied second underfill composition is brought into a B-stage to form a layer wherein a total thickness including the layer of the first underfill composition ranges from 1.0 to 1.3 times the height of the solder bump. <P>COPYRIGHT: (C)2009,JPO&INPIT</p>
申请公布号 JP2009135308(A) 申请公布日期 2009.06.18
申请号 JP20070310970 申请日期 2007.11.30
申请人 SHIN ETSU CHEM CO LTD 发明人 KATO KAORU
分类号 H01L23/29;H01L21/60;H01L23/31 主分类号 H01L23/29
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