ELECTRON MICROSCOPE AND METHOD FOR EXAMINING A SAMPLE USING AN ELECTRON MICROSCOPE

摘要

The invention relates to an electron microscope (1) comprising an electron source (2) for generating an electron beam (3), an electron column (4) through which the electron beam (3) strikes a sample (7) arranged on a sample table (6) in a sample chamber (5), at least one pressure-limiting aperture (8) arranged on an end side on the electron column (4), and a detector (9) for detecting low-energy electrons (10) generated from the sample (7). According to the invention, the electron column (4) has a clear diameter (11) which is either constant along the longitudinal axis (X) or tapers toward the sample chamber (5) and is designed to be moveable relative to the sample table (6) and independent from the detector (9) such that the sample (7) can be examined under atmospheric pressure and/or at room temperature. The invention additionally relates to a use of such an electron microscope (1). The invention further relates to a method for examining a sample (7) using an electron microscope (1), wherein an electron beam (3) is generated by an electron source (2), which is guided through an electron column (4) and at least one pressure-limiting aperture (8) to the sample (7) arranged on a sample table (6) in a sample chamber (5), from which low-energy electrons are created and detected by a detector (9).