WORKPIECE PROCESSING CHAMBER HAVING A ROTARY MICROWAVE PLASMA ANTENNA WITH SLOTTED SPIRAL WAVEGUIDE

摘要

A microwave antenna includes a first spiral conduit having a first conduit end, first plural ports in a floor of the first spiral conduit spaced apart along the length of the first spiral conduit; an axial conduit coupled to a rotatable stage; and a distributor waveguide comprising an input coupled to the axial conduit and a first output coupled to the first conduit end.

主权项

1. A reactor for processing a workpiece comprising:
a chamber and a workpiece support surface in said chamber; a rotary coupling comprising a stationary stage and a rotatable stage having an axis of rotation; a microwave source coupled to said stationary stage; a rotation actuator; a microwave antenna coupled to said rotation actuator and overlying said chamber, said microwave antenna comprising:
a floor and a ceiling;a first spiral wall extending between said floor and said ceiling and having a spiral axis corresponding to said axis of rotation, said first spiral wall defining a first spiral conduit having a first conduit end;first plural ports in said floor spaced apart along the length of said first spiral conduit;an axial conduit coupled to said rotatable stage; anda distributor waveguide comprising an input coupled to said axial conduit and a first output coupled to said first conduit end.