| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing device which has a holding table and which can reliably detect difference between light volume of reflection light reflected on a workpiece held to the holding table and light volume of reflection light coming off the workpiece to be processed and reflected on a frame of the holding table.SOLUTION: A laser processing device includes: a holding table holding a workpiece to be processed; laser beam irradiation means for applying laser beams on the workpiece held to the holding table; movement means for relatively moving the holding table and the laser beam irradiation means; detection means for applying detection light to the workpiece held to the holding table to detect light volume of reflection light reflected on the workpiece; and control means for determining presence or absence of the workpiece on the basis of detection signals from the detection means. The holding table includes a holding part sucking/holding the workpiece and a circular frame body surrounding the holding part. The top surface of the frame body is subjected to diffuse processing for diffusing light. |
