| 摘要 |
PROBLEM TO BE SOLVED: To provide a system for inspecting a specimen.SOLUTION: A system may include a dual-channel microscope, two illuminators, each being coupled to illuminate a different channel of the dual-channel microscope, and two detectors, each being coupled to a different channel of the dual-channel microscope to acquire images of a specimen. Means are provided for separating the channels of the dual-channel microscope, so that the two detectors can acquire the images of the specimen at substantially the same time. The channels of the dual-channel microscope may be spectrally separated by configuring the two illuminators such that they produce light in two substantially non-overlapping spectral ranges. The channels of the dual-channel microscope may be spatially separated by positioning the two detectors such that illumination light do not overlap and the fields of view of the two detectors do not overlap within a field of view of an objective lens included within the system. |
