| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope, capable of measuring a minute local friction force acting between a cantilever and a sample surface, by precisely controlling minute displacement amount or the displacement speed of the cantilever on the sample surface. SOLUTION: In the measuring method that uses the scanning probe microscope, which displays an image based on a detected signal based on the physical quantities acting between a sample and a facing probe, the cantilever having the probe is vibrated in the direction of the sample surface by using a vibration means; and the distance between the sample and the probe is varied by a scanner, and the probe is pressed into the sample, thereby measuring the minute friction force of the sample. COPYRIGHT: (C)2007,JPO&INPIT
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