| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface inspection method for rapidly and accurately detecting defects in a surface coating of conductive particles formed by coating the surfaces of spherical bodies formed of a nonconductive material, with conductive films. SOLUTION: The method of inspecting defects in the surfaces of the conductive particles 3 formed by coating the surfaces of the spherical bodies formed of the nonconductive material, with the conductive films, comprises processes of arranging a plurality of conductive particles 3 not to overlap one another, photographing the plurality of conductive particles 3 with an X-ray camera 6 to acquire an image by X-rays, and detecting defects in the surface of the conductive particles based on the density of the conductive particles 3 in the photographed image of the plurality of conductive particles 3. In the process of detecting the defects in the surface coating, the presence of surface defects is detected by comparing image data of the conductive particles photographed with the X-ray camera, with reference data corresponding to the image of the conductive particles in the case of no defects existing in the surface coating. COPYRIGHT: (C)2007,JPO&INPIT
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