发明名称 ANGULAR VELOCITY DETECTION ELEMENT, ANGULAR VELOCITY DETECTION DEVICE, ELECTRONIC APPARATUS, AND MOVING OBJECT
摘要 A gyro element includes a base section, a pair of drive arms connected to the base section, and a detection section adapted to detect an angular velocity applied in a state in which the drive arms are flexurally vibrated in a drive vibration mode, and the drive arms vibrate in phase in the in-plane direction of the base section 21, and vibrate in reverse phase in a thickness direction of the base section 21.
申请公布号 US2016282117(A1) 申请公布日期 2016.09.29
申请号 US201615073742 申请日期 2016.03.18
申请人 Seiko Epson Corporation 发明人 NAKAGAWA Keiji
分类号 G01C19/5642 主分类号 G01C19/5642
代理机构 代理人
主权项 1. An angular velocity detection element comprising: a base section; at least two drive arms connected to the base section; and a detection section adapted to detect an angular velocity applied in a state in which the two drive arms are flexurally vibrated in a drive vibration mode, wherein in the drive vibration mode, the two drive arms flexurally vibrate in phase in an in-plane direction of the base section, and flexurally vibrate in reverse phase along a thickness direction that is crossing the in-plane direction.
地址 Tokyo JP
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