发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device and a method of manufacturing the same capable of suppressing generation of cracks in an insulating film located below wiring while suppressing increase in wiring resistance.SOLUTION: A semiconductor device 1 includes a semiconductor substrate 12. A passivation film 14 is formed on the semiconductor substrate 12. On the passivation film 14, wiring 15 that has a marginal part 42 and an inner part 43 located at an inner side from the marginal part 42 is formed. The marginal part 42 of the wiring 15 includes a thin-film part 44 (an inclined part 45) having a thickness smaller than that of the inner part 43.SELECTED DRAWING: Figure 4
申请公布号 JP2016219749(A) 申请公布日期 2016.12.22
申请号 JP20150106699 申请日期 2015.05.26
申请人 ROHM CO LTD 发明人 TANAKA BUNGO
分类号 H01L21/3205;H01L21/768;H01L23/522 主分类号 H01L21/3205
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