| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser oscillation device capable of clearly separating occurrence of presence or absence of misalignment of a rotary section caused by breakage of the bearing of a blower, or the like, capable of detecting misalignment without taking time after occurrence thereof, while furthermore capable of emergency stop of the rotary section when a determination is made that misalignment has occurred.SOLUTION: A gas laser oscillation device includes a blower for supplying laser gas, the rotary section of the blower includes a shaft provided with an impeller at the tip, a drive section for rotating the shaft, and a co-rotating ring placed between the impeller and an upper bearing. A non-rotating section includes a housing, a scroll covering the impeller, and a fixed part spacer placed at a position facing the co-rotating ring while having a predetermined gap thereto. A temperature detector in contact with the fixed part spacer is provided.SELECTED DRAWING: Figure 2 |
