| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface treatment apparatus capable of preventing an atmosphere below a roller conveyor from entering a treatment space. <P>SOLUTION: In this apparatus, a treatment gas is introduced between electrodes 33 and 34 to generate plasma and spurted downward through a plasma blow-off means 20 while an object to be treated W is conveyed transversely below the blow-off means 20 with the roller conveyor 10. A container 50 to store an inert gas is so disposed as to hold the roller conveyor 10 therein which are directly below the blow-off means 20. An upper plate, namely a cover plate 51 of the inert gas container 50 is fixed slightly lower than the level of conveying the object to be treated W. The plate 51 has roller-clearance holes 51d through which the upper edge part of the roller 12 of the conveyor is exposed. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
