METHOD AND APPARATUS FOR TREATING GAS CONTAINING FLUORINE-CONTAINING COMPOUNDS,申请号EP20050721554-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR TREATING GAS CONTAINING FLUORINE-CONTAINING COMPOUNDS
摘要
申请公布号	EP1732669(A1)	申请公布日期	2006.12.20
申请号	EP20050721554	申请日期	2005.03.18
申请人	EBARA CORPORATION	发明人	MORI, YOICHI;NISHIKAWA, TADAKAZU;OSATO, MASAAKI;NAGANO, SABUROU;TANABE, YOSHIHIRO
分类号	B01D53/70;B01D53/62;B01D53/68;C01F11/22	主分类号	B01D53/70
代理机构		代理人
主权项
地址

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