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发明名称
Interferometer und Positionsmessvorrichtung
摘要
申请公布号
DE10249409(B4)
申请公布日期
2007.09.20
申请号
DE2002149409
申请日期
2002.10.23
申请人
CANON K.K.
发明人
KATO, SHIGEKI
分类号
G01B9/02
主分类号
G01B9/02
代理机构
代理人
主权项
地址
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