发明名称 |
PRECURSOR COMPOSITION FOR POROUS MEMBRANE, PROCESS FOR PREPARATION OF THE PRECURSOR COMPOSITION, POROUS MEMBRANE, PROCESS FOR PRODUCTION OF THE POROUS MEMBRANE, AND SEMICONDUCTOR DEVICE |
摘要 |
<p>Disclosed is a precursor composition comprising: a compound selected from a compound represented by the formula: Si(OR<SUP>1</SUP>)<SUB>4</SUB> and a compound represented by the formula: R<SUB>a</SUB>(Si)(OR<SUP>2</SUP>)<SUB>4-a</SUB> (in the formulae, R<SUP>1</SUP> represents a univalent organic group; R represents a hydrogen atom, a fluorine atom or a univalent organic group; R<SUP>2</SUP> represents a univalent organic group; and a represents an integer ranging from 1 to 3, provided that R, R<SUP>1</SUP> and R<SUP>2</SUP> are the same as or different from one another); a thermally degradable organic compound; an element having a catalytic activity; urea; and the like. A porous membrane produced from the precursor composition is irradiated with ultraviolet ray, and then subjected to gas-phase reaction with a hydrophobic compound. A porous membrane thus prepared can be used for the manufacture of a semiconductor device.</p> |
申请公布号 |
WO2007142000(A1) |
申请公布日期 |
2007.12.13 |
申请号 |
WO2007JP60027 |
申请日期 |
2007.05.16 |
申请人 |
ULVAC, INC.;FUJII, NOBUTOSHI;NAKAYAMA, TAKAHIRO;KOHMURA, KAZUO;TANAKA, HIROFUMI |
发明人 |
FUJII, NOBUTOSHI;NAKAYAMA, TAKAHIRO;KOHMURA, KAZUO;TANAKA, HIROFUMI |
分类号 |
C08J9/36;C08G77/18;C09D5/25;C09D7/12;C09D183/04;H01L21/312;H01L21/316 |
主分类号 |
C08J9/36 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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