An apparatus for providing a pulsed radiation beam has a radiation source providing a pulsed radiation beam at a constant pulse repetition frequency. A beam deflector in the path of the pulsed radiation beam is actuable to redirect the pulsed radiation beam cyclically towards each of a plurality of beam intensity modulators in turn. A beam recombiner combines modulated light from each of the plurality of beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency.
申请公布号
WO2008088397(A3)
申请公布日期
2009.01.08
申请号
WO2007US18869
申请日期
2007.08.28
申请人
CORNING INCORPORATED;COBB, JOSHUA, M;DEWA, PAUL, G