| 摘要 |
PROBLEM TO BE SOLVED: To provide a drawing apparatus which is advantageous for suppressing degradation of drawing performance and detection performance when performing drawing and position detection on a substrate.SOLUTION: The drawing apparatus comprises a plurality of drawing means for irradiating the charged particle beam to a substrate 1, a first holding portion 2a, a second holding portion 2b displaceable with respect to the first holding portion 2a, and a driving unit 6 that drives the second holding portion 2b, holding means 2 for holding the substrate 1, and control means for controlling the drive section 6. After the drawing process is performed on the substrate 1 by using a plurality of drawing means in a state where the second holding portion 2b is in the first position, the control means controls the driving unit 6 so that the drawing processing is performed on the substrate 1 by using a plurality of drawing means in a state where the second holding portion 2b is located at a second position different from the first position.SELECTED DRAWING: Figure 2 |
