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发明名称
Leistungshalbleitervorrichtung und Herstellungsverfahren einer Leistungshalbleitervorrichtung
摘要
申请公布号
DE19822763(B4)
申请公布日期
2007.05.03
申请号
DE19981022763
申请日期
1998.05.20
申请人
MITSUBISHI DENKI K.K.;RYODEN SEMICONDUCTOR SYSTEM ENGINEERING CORP.
发明人
KAWAKAMI, MINORU;YANO, MITSUHIRO;YAMASHITA, YASUNORI;SOUNO, HIDETOSHI
分类号
H01L29/36;H01L29/78;H01L21/28;H01L21/308;H01L21/322;H01L21/336
主分类号
H01L29/36
代理机构
代理人
主权项
地址
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