MANUFACTURING METHOD OF THE MULTICOMPONENT METAL OXIDE THIN FILM

摘要

A formation method of the multi-component metal oxide thin film is provided to adjust the minute composition by controlling the growing thickness for the process by managing the reaction time. A formation method of the multi-component metal oxide thin film comprises: a step for forming a plurality of single-component system metal oxide layers comprising a multi-component system metal oxide thin film to be the laminated type structure and a step for forming the single phase multi-component thin film through the solid diffusion reaction. A plurality of single-component system metal oxide layers formation is the PRTMOCVD(Pulsed Rapid Thermal Metal Organic Chemical Vapor Deposition).