| 发明名称 |
FILTER AND TARGET SUPPLY APPARATUS |
| 摘要 |
A filter may include: a first member having a first surface provided with a channel; and a second member set with a second surface thereof covering the channel. The first member may include a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the channel. The second member may include a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the channel distanced from the first area. |
| 申请公布号 |
US2016227637(A1) |
申请公布日期 |
2016.08.04 |
| 申请号 |
US201414992477 |
申请日期 |
2014.06.13 |
| 申请人 |
GIGAPHOTON INC. |
发明人 |
ICHINOSE Tomohide;IWAMOTO Fumio;SHIRAISHI Yutaka;HORI Tsukasa;HOSHINO Hideo |
| 分类号 |
H05G2/00;G03F7/20 |
主分类号 |
H05G2/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A filter comprising:
a first member having a first surface provided with a channel; and a second member set with a second surface thereof covering the channel, the first member including a first passable portion that allows a fluid to pass between the first surface and a first space, which is defined beside a surface of the first member opposite to the first surface, through a first area of the channel, the second member including a second passable portion that allows the fluid to pass between the second surface and a second space, which is defined beside a surface of the second member opposite to the second surface, through a second area of the channel distanced from the first area. |
| 地址 |
Tochigi JP |
