| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a magnetic sensor, in which a magnetic convergence plate with a high magnetic permeability and a small coercive force is arranged, with a small positional variation, on a substrate having a Hall element and a circuit and in which the number of manufacturing processes is prevented from increasing.SOLUTION: In a process of forming a Hall element and a circuit on a silicon substrate in the method for manufacturing a magnetic sensor, a pattern having a recess of the same form and size as that of a magnetic convergence plate, that is, a magnetic convergence plate folder is formed, and the magnetic convergence plate folder is provided with a magnetic convergence plate in the folder, which is obtained in a step different from the step of manufacturing the silicon substrate having the Hall element and the circuit.SELECTED DRAWING: Figure 1 |
