| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical device and exposure device using the optical device that serve for an optical modulation function and a light-amount adjustment function, and enable a highly accurate exposure.SOLUTION: A first modulation unit with a first periodically polarization-reversed structure, and a second modulation unit with a second periodically polarization-reversed structure are adjacently provided in a direction where light travels. On the basis of light incident upon the first modulation unit, light emerging from the first modulation unit and an amount of light of at least one of light incident upon the second modulation unit and light emerging from the second modulation unit, a diffraction grating is formed in the first modulation unit by a voltage to be given to the first modulation unit and then, an amount of light of modulation light is adjusted. On the basis of exposure data, a diffraction grating is formed in the second modulation unit by a voltage to be given to the second modulation unit to implement an optical modulation corresponding to the exposure data.SELECTED DRAWING: Figure 4 |
