| 摘要 |
PROBLEM TO BE SOLVED: To provide beam irradiation device and method that can enhance the quality of beam irradiation processing.SOLUTION: A beam irradiation device 10 has a beam scanner 26 for sweeping a charged particle beam B in a predetermined reciprocating scan direction, a measuring unit 42 capable of measuring an angle component of a charged particle incident to an area as a measurement target, and a data processor for calculating an effective irradiation emittance of the charged particle beam B by using a measurement result of the measuring unit 42. The measuring unit 42 measures a time-variation value of an angle distribution for the charged particle beam B over a time for which the charged particle beam swept in the reciprocating scan direction passes through the area as the measurement target and is incident to the measuring unit 42, and the data processor converts time information contained in the time-variation value of the angle distribution measured by the measuring unit to position information, and calculates the effective irradiation emittance. The effective irradiation emittance represents the emittance of a virtual beam flux formed by combining a part of the charged particle beam which is swept in the scan direction and incident to the area as the measurement target. |
