发明名称 REFLECTION TYPE ENCODER
摘要 [Problem] To provide an encoder that easily achieves stable operation and that can perform high-quality analog displacement output. [Solution] An interference optical system having a collimating lens, with a diffraction grating placed on the flat surface thereof, is sandwiched between a substrate on which a laser oscillator and a light receiving section are provided and a scale. Thereby, it is possible to provide a reflection type encoder that easily improves signal quality while keeping to a minimum portions requiring highly accurate assembly and machining and that can perform analog displacement output by interference within the interference optical system.
申请公布号 WO2016195056(A1) 申请公布日期 2016.12.08
申请号 WO2016JP66536 申请日期 2016.06.03
申请人 NAMIKI SEIMITSU HOUSEKI KABUSHIKI KAISHA;ADAMANT KABUSHIKI KAISHA;SAWADA Renshi 发明人 SAWADA Renshi;NAKAMURA MOTOICHI;ISHIKAWA MASANORI;KUGOU Tomoyuki;OKAMOTO CHIHIRO;AOYAGI Tomohide
分类号 G01D5/347;G02B5/18;G02B13/00 主分类号 G01D5/347
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