Thrust controllable actuator

摘要

A thrust producer of a moving-magnet type includes a rod supported for upward and downward movements by an apparatus main body through an air hydrostatic bearing and a thrust producer for moving the rod up and down, the thrust producer has a magnet mounted to the rod to be displaced with the rod and a coil provided to the apparatus main body to generate magnetic force when the coil is energized, and the thrust producer produces thrust by an interaction of the magnet and the magnetic force generated by the coil.