| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a deformable optical system, a deformable optical device and a wave front aberration correcting method by which the comparatively high-order term of wave front aberration in an optical system can be corrected. <P>SOLUTION: The deformable optical system has a reflection device having a 1st reflection surface and a 2nd reflection surface, an integrated circuit actuator having a movable extension part extended from a supporting surface and coupled with the 2nd surface, an electrode individually coupled with one corresponding extension part of the above extension part, and a controller coupled with the electrode. By constituting the controller, the extension part is controlled through the electrode. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
